carbonplasma相关论文
Fabrication of large area tetrahedral amorphous carbon (ta-C) films by multi-cathode filtered vacuum
...
为了研究不同空气压力条件下碳等离子体的动力学特性, 采用发射光谱法对碳等离子体进行诊断。采用1064 nm Nd∶YAG激光器烧蚀碳靶,......